TY  - BOOK
AU  - Senturia, Stephen D.
TI  - Microsystems design
SN  - 81-8128-546-8
U1  - 621.381 SEN 
CY  - New Delhi
PB  - Springer Publishing Company
KW  - Electrical Engineering
KW  - Microsystems,design
N1  - Faculty, students and Staff
UR  - https://libgen.is/book/index.php?md5=8F645FA080798C6E3409AD6D70027B7E
ER  -